Revolutionizing Semiconductor Production with ASML Twinscan NXT:870

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Revolutionizing Semiconductor Production with ASML Twinscan NXT:870

High Productivity and Precision

ASML's TWINSCAN NXT:870 incorporates state-of-the-art optics and the latest NXT platform technology to deliver exceptional performance in semiconductor lithography. With a resolution capability of 110 nm and below, this system is optimized for volume production of 300 mm wafers. The integration of a dual-stage KrF light source ensures precise and efficient operation, allowing for the production of up to 330 300-mm wafers per hour. The utilization of highly line-narrowed 40 & 60 W KrF lasers, coupled with advanced optical transmission, guarantees high productivity at a low operational cost.

Enhanced Optics for Superior Imaging

The TWINSCAN NXT:870 system features a variable 0.80 NA 248 nm 865 projection lens, which enables the achievement of minimal aberrations and tight focal planes. This superior optic design ensures excellent distortion control, with annular distortion maintained at or below 10 nm. By leveraging the imaging power of a ZEISS Starlith lens combined with AERIAL II and optional QUASAR XL illuminator technology, the NXT:870 system extends the capabilities of KrF technology to deliver exceptional imaging performance for demanding semiconductor applications.

Unmatched Imaging Performance and Precision

ASML's TWINSCAN NXT:870 excels in imaging performance, offering a ≤ 7.5 nm matched-machine full-wafer-coverage overlay. With the inclusion of the PARIS sensor, the system provides customers with the ability to precisely set up and monitor imaging parameters, ensuring unparalleled accuracy and control. The system's innovative dual-stage technology further enhances imaging capabilities and maintains high throughput levels across a wide range of resist sensitivities, making it a reliable and efficient solution for semiconductor fabrication.

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ASML Twinscan XT:1460K - Empowering High-Productivity Lithography Solutions

High-Productivity Lithography Tool

The ASML Twinscan XT:1460K stands out as a high-productivity dry ArF lithography tool, offering exceptional overlay and imaging performance for volume production at a resolution of 65 nm. This 193 nm step-and-scan system is specifically designed for volume 300 mm wafer production, equipped with a variable 0.93 NA 193 nm projection lens with advanced lens manipulators. The tool's dual wafer-stage technology allows for the exposure of one wafer while aligning the next in parallel, reducing overhead time and enabling continuous patterning for maximum productivity.

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Revolutionizing Lithography with ASML Twinscan XT:1060K

Advanced Lithography Technology for Enhanced Productivity

ASML's TWINSCAN XT:1060K is a cutting-edge KrF laser 'dry' lithography system, offering unparalleled performance in the industry. This 248 nm step-and-scan system boasts dual-stage lithography capabilities, delivering the highest numerical aperture (NA) and productivity for 300 mm wafer production. By leveraging critical KrF technology, this system significantly reduces the cost per layer for customers while harnessing the benefits of mature KrF processing.

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Enhancing User Experience with ASML Twinscan Cookie Management

Understanding Cookies and Their Functionality

Cookies play a vital role in enhancing user experience on websites. ASML Twinscan utilizes cookies as small text files that are sent to your browser. These files enable various features and functionality on the website by 'remembering' your actions and preferences over time. Session-based cookies are temporary and are automatically deleted when you close your browser, while persistent cookies last until they are deleted or expire. ASML Twinscan uses both first-party and third-party cookies, enhancing user interaction and customization on the website.

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ASML Twinscan SupplierNet Portal: Empowering Supplier Collaboration and Responsible Supply Chain Practices

Welcome to SupplierNet

ASML Twinscan SupplierNet is a secure portal exclusively designed for ASML's suppliers, providing them with a streamlined platform for effective collaboration and communication. By logging in to SupplierNet, suppliers can access dedicated portals and relevant information tailored to their specific needs. This centralized hub enhances operational efficiency and ensures timely access to key resources.

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ASML Twinscan Customer Support Solutions and Services

24/7 Support for Uninterrupted Operations

ASML Twinscan offers comprehensive 24/7 support to ensure that their customers' systems run smoothly without any downtime. With thousands of systems in customer fabs globally, the dedicated service engineers work tirelessly to prevent any unscheduled downtime, which could cost customers significant amounts per minute. By utilizing deterministic diagnostics and predictive methods, ASML optimizes maintenance and upgrades in collaboration with customers' production schedules to prevent disruptions. The company's adherence to global ISO 9001:2015 certification guarantees quality in all processes, reflecting their commitment to excellence and reliability.

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